THREE-DIMENSIONAL SHAPE MEASUREMENT METHOD, DISPLACEMENT MEASUREMENT METHOD, THREE-DIMENSIONAL SHAPE MEASUREMENT DEVICE, DISPLACEMENT MEASUREMENT DEVICE, STRUCTURE FABRICATION METHOD, STRUCTURE FABRICATION SYSTEM AND THREE-DIMENSIONAL SHAPE MEASUREMENT PROGRAM

PROBLEM TO BE SOLVED: To measure a three-dimensional shape of a measurement object with high accuracy.SOLUTION: A three-dimensional shape measurement method includes: sequentially projecting a measurement object at a projection angle with a plurality of structure light different in an amount of phase feed; photographing a measurement image of the measurement object having the plurality of structure light projected; and calculating a three-dimensional shape of the measurement object using a phase shift method on the basis of a plurality of photographed measurement images. Signal intensity of each pixel of the measurement image is expressed by an expression using an amount of offset of the structure light in the measurement image, amplitude thereof, phase thereof, amount of phase feed thereof, number of phase steps thereof, and index of the pixel thereof, and the calculation of the three-dimensional shape includes: calculation of the phase on the basis of the signal intensity, amount of offset, amplitude and amount of phase feed; and the calculation of the three-dimensional shape of the measurement object on the basis of the calculated phase.SELECTED DRAWING: Figure 6 【課題】測定対象物の三次元形状を精度よく測定する。【解決手段】位相送り量が異なる複数の構造光を所定の投影角で測定対象物に順次、投影することと、複数の構造光が投影された測定対象物の測定像をそれぞれ撮像することと、撮像された複数の測定像に基づいて、位相シフト法を用いて測定対象物の三次元形状を算出することと、を含む三次元形状測定方法であって、測定像の各画素の信号強度は、測定像における構造光のオフセット量、振幅、位相、位相送り量、位相ステップ数、画素のインデックス、を用いた式で表され、三次元形状の算出は、信号強度と、オフセット量と、振幅と、位相送り量との値に基づいて、位相を算出することと、算出された位相に基づいて測定対象物の三次元形状を算出することと、を含む。【選択図】図６