FLUORESCENT X-RAY ANALYZER

PROBLEM TO BE SOLVED: To provide a fluorescent X-ray analyzer that monitors the degree of intra-device contamination by a substance scattered from a sample that includes a radioactive element, prompts appropriate execution of cleaning and maintenance, and maintains high-accuracy analysis.SOLUTION: The fluorescent X-ray analyzer comprises: an X-ray source 5 for radiating a primary X-ray 13 from an X-ray radiation window 6; detection means 15 disposed so as to measure the intensity of an X-ray generated from a sample 3 provided facing the X-ray radiation window 6; and intra-device contamination degree monitoring means 22 which, while the check sample 3 that does not include a radioactive element is provided facing the X-ray radiation window 6 or none of the sample 3 is provided facing the X-ray radiation window 6, periodically performs X-ray intensity measurement by the detection means 15 without radiating the primary X-ray 13 to the visual field of the detection means 15 and preserves the measurement result, and outputting the preserved X-ray intensity measurement result.SELECTED DRAWING: Figure 1 【課題】放射性元素を含む試料から飛散した物質による装置内汚染度を監視し、清掃メンテナンスの適切な実施を促して、高精度の分析を維持する蛍光Ｘ線分析装置を提供する。【解決手段】本発明の蛍光Ｘ線分析装置は、Ｘ線放射窓６から１次Ｘ線１３を放射するＸ線源５と、Ｘ線放射窓６に対設された試料３から発生するＸ線の強度を測定するように配設された検出手段１５と、放射性元素を含まないチェック試料３がＸ線放射窓６に対設された状態で、または、Ｘ線放射窓６に何も試料３が対設されない状態で、検出手段１５の視野に１次Ｘ線１３を照射せずに検出手段１５によるＸ線強度測定を定期的に行ってその結果を保存し、保存したＸ線強度測定結果を出力する装置内汚染度監視手段２２とを備える。【選択図】図１