INK JET HEAD, MANUFACTURING METHOD FOR THE SAME AND INK JET DEVICE

PROBLEM TO BE SOLVED: To provide an ink jet head that can improve the ejection performance of the ink jet head by precisely joining a nozzle plate and a flow passage forming substrate, a vibration plate, and a piezoelectric element.SOLUTION: A substrate 4 which is bonded to a piezoelectric element on a different surface from a surface of the piezoelectric element 1 which is bonded to a vibration plate 3 has a projecting portion 10a having a flat surface on the same plane as the surface on which the piezoelectric element and the vibration plate are bonded to each other on the outer side of the piezoelectric element in a driving channel direction, a positioning mark 5 on the same plane of the projecting portion, and an adhesive portion 10b existing on the whole periphery of the positioning mark. Positioning is performed at the position corresponding to the positioning mark by a positioning hole 3a of the vibration plate, a positioning hole 21a of a flow path forming substrate, and a positioning hole 9a of a nozzle plate.SELECTED DRAWING: Figure 1 【課題】ノズル板および流路形成基板、振動板、圧電素子を精度良く接合することにより、インクジェットヘッドの吐出性能を向上させることができるインクジェットヘッドを提供する。【解決手段】圧電素子１の振動板３に接合される面と別の面で圧電素子に接着される基板４は、圧電素子の駆動チャンネル列方向の両端部の外側に、圧電素子と振動板が接合される面と同一平面上に平面を有する突起部１０ａと、この突起部の同一平面上の、位置決めマーク５と位置決めマークの全周囲に存在する接着部１０ｂと、を有しており、位置決めマークに対応する位置に振動板の位置決め穴３ａと流路形成基板の位置決め穴２１ａとノズル板の位置決め穴９ａとによって位置決めを行う。【選択図】図１