CONTROL APPARATUS AND METHOD, EXPOSURE APPARATUS AND METHOD, DEVICE MANUFACTURING METHOD, DATA GENERATING METHOD, AND PROGRAM

PROBLEM TO BE SOLVED: To control a spatial light modulator so as to preferably transfer a prescribed pattern onto an object.SOLUTION: The control method is a method for controlling a spatial light modulator for setting respective states of a plurality of optical elements provided to the spatial ligh...

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Bibliographische Detailangaben
Hauptverfasser:	YASHIKI KEN, MATSUI RYOTA, MAKITSUBO HIRONOBU
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Zusammenfassung:	PROBLEM TO BE SOLVED: To control a spatial light modulator so as to preferably transfer a prescribed pattern onto an object.SOLUTION: The control method is a method for controlling a spatial light modulator for setting respective states of a plurality of optical elements provided to the spatial light modulator that modulates and emits incident light. The method includes: acquiring a property of light that is generated by synthesizing light that makes incident on a gap between a first and a second optical elements disposed neighboring to each other and exits from the gap and light via the first optical element; and setting the state of the first optical element by using the acquired property of the synthesized light.SELECTED DRAWING: Figure 5 【課題】所望のパターンを物体に好適に転写するように空間光変調器を制御する。【解決手段】制御方法は、入射する光を変調して射出する空間光変調器が備える複数の光学要素のそれぞれの状態を設定する、空間光変調器の制御方法であって、互いに隣接して配置される第１及び第２光学要素のすき間に入射してすき間から射出される光と、第１光学要素を介した光とを合成した光の特性を得ることと、得られた合成した光の特性を用いて、第１光学要素の状態を設定することとを含む。【選択図】図５