ANGULAR VELOCITY SENSOR DEVICE
PROBLEM TO BE SOLVED: To provide an angular velocity sensor device that can suppress undesired vibrations and can increase the detection accuracy.SOLUTION: Control electrodes 50a and 50b are formed on the back surface of a cap layer 13 and on the front surface of a supporting substrate 11, which all...
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| Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an angular velocity sensor device that can suppress undesired vibrations and can increase the detection accuracy.SOLUTION: Control electrodes 50a and 50b are formed on the back surface of a cap layer 13 and on the front surface of a supporting substrate 11, which allows adjustment of drive vibration positions of drive/detection spindles 31 and 32 in a Z-axis direction. This makes it possible to control the drive vibration positions of drive/detection spindles 31 and 32 to be desired positions in the Z-axis direction and to suppress undesired vibrations. In that way, the angular velocity sensor device can have an increased accuracy of detecting an angular velocity.SELECTED DRAWING: Figure 2
【課題】不要振動を抑制し、検出精度を向上させることが可能な角速度センサ装置を提供する。【解決手段】支持基板１１の表面とキャップ層１３の裏面に制御電極５０ａ、５０ｂを形成し、制御電極５０ａ、５０ｂによってｚ軸方向における駆動兼検出錘３１、３２の駆動振動位置を調整可能とする。これにより、駆動兼検出錘３１、３２の駆動振動位置をｚ軸方向の所望位置に制御することができて、不要振動を抑制できる。よって、角速度センサ装置による角速度の検出精度を向上させることが可能となる。【選択図】図２ |
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