CONVEYANCE FACILITY

PROBLEM TO BE SOLVED: To provide a conveyance facility capable of constructing a facility at low cost without needing high flexible cables even while maintaining high cleanliness without any intrusion of foreign substances such as dusts into a housing container for housing a substrate.SOLUTION: During transfer of a housing container 20 between conveyance truck 50 and a storage shelf 13, a container pad 28 for supplying power in non-contact to an FFU 24 that blows air into the housing container 20 moves away from both a conveyance truck pad 58 and a storage shelf pad 18 to stop the air blowing. However, while the air blowing is stopped, cleanliness is maintained in the housing container 20 by preventing intrusion of external dust by inner pressure increased in the housing container 20 by the FFU 24.SELECTED DRAWING: Figure 6 【課題】基板収納用の収納容器内に塵埃などの外部物質を流入させずに清浄性を高く保つことが可能でありながらも、高可撓性ケーブルなどを必要とせず低コストで設備構築を行うことが可能な搬送設備を提供する。【解決手段】収納容器２０が搬送台車５０と保管棚１３との間で移載される間には、収納容器２０内に送風を行うＦＦＵ２４への非接触給電用の容器パッド２８が搬送台車パッド５８からも保管棚パッド１８からも離れて送風が停止するが、送風停止中は、移載開始前までにＦＦＵ２４が高めた収納容器２０内の内圧によって外部の塵埃流入を防ぐことで、収納容器２０内の清浄性を保つ。【選択図】図６