SURFACE ROUGHNESS EVALUATION DEVICE AND SURFACE ROUGHNESS EVALUATION METHOD

PROBLEM TO BE SOLVED: To provide a surface roughness evaluation device and a surface roughness evaluation method that can predict and evaluate the three-dimensional shape of a measurement target surface rapidly based on data obtained by two-dimensional measurement.SOLUTION: Based on roughness curve data obtained by a displacement meter capable of two-dimensional measurement, the peak height H of roughness curve data and the skirt width 2R are sequentially determined, and the average value of the ratio H/R is calculated from a plurality of peak heights H and the skirt widths 2R. Based on the two-dimensional probability density functionf(h) obtained by approximating the histogram of the obtained peak height and the average value of the H/R ratio, a three-dimensional probability density functionf(h) is derived.SELECTED DRAWING: Figure 1 【課題】２次元計測により得られたデータに基づき、迅速に被測定物体表面の３次元形状を予測・評価することが可能な表面粗さ評価装置及び表面粗さ評価方法を提供する。【解決手段】２次元計測可能な変位計により得られた粗さ曲線データに基づき、粗さ曲線データのピーク高さHと、その裾野幅2Rとを順次求め、複数のピーク高さHと、その裾野幅2RとからH/R比の平均値を算出し、得られたピーク高さのヒストグラムを近似して得られた２次元確率密度関数2fh(2hpeak)と、H/R比の平均値とに基づき、３次元確率密度関数3fh(3hpeak)を導出するように構成する。【選択図】図１