INSPECTION DEVICE

PROBLEM TO BE SOLVED: To provide an inspection device capable of reducing the capacity of a load lock chamber as further as possible.SOLUTION: An inspection device M comprises: an inspection chamber 1 including a lens barrel 11 for irradiating a specimen W that should be inspected in vacuum, with a...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	TOJO TORU
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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