INSPECTION DEVICE

PROBLEM TO BE SOLVED: To provide an inspection device capable of reducing the capacity of a load lock chamber as further as possible.SOLUTION: An inspection device M comprises: an inspection chamber 1 including a lens barrel 11 for irradiating a specimen W that should be inspected in vacuum, with a beam; a stage 10 which moves while supporting the specimen within the inspection chamber; a load lock chamber 2 which is installed continuously with the inspection chamber via a gate valve IV, and can be vacuumed; and transport means 3 for transporting the specimen between the inspection chamber and the load lock chamber. The inspection device also comprises: first and second guide rails 30a and 30b, when a continuous installation direction of the inspection chamber and the load lock chamber is defined as an X axis direction, which are provided in parallel on a wall surface 1a of the inspection chamber and extend in the X axis direction; and first and second hands 31a and 31b which are provided in the first and second guide rails and hold the specimen. Both the first and second hands are configured to be freely movable among a first delivery position P where the specimen is delivered to the load lock chamber, a second delivery position P2 where the specimen is delivered to the stage, and a predetermined retraction position P3.SELECTED DRAWING: Figure 1 【課題】ロードロック室を可能な限り小容積化することができる検査装置を提供する。【解決手段】検査装置Ｍは、真空中で検査すべき試料Ｗに対してビームを照射する鏡筒１１を有する検査室１と、検査室の内部で試料を支持した状態で移動するステージ１０と、検査室と仕切弁ＩＶを介して連設される、真空引き可能なロードロック室２と、検査室とロードロック室との間で試料を搬送する搬送手段３とを備え、検査室とロードロック室の連設方向をX軸方向とし、検査室の壁面１ａに並設されるX軸方向に沿ってのびる第１及び第２のガイドレール３０ａ，３０ｂと、第１及び第２のガイドレールに設けられて試料を保持する第１及び第２のハンド３１ａ，３１ｂとを備え、これら第１及び第２の両ハンドは、ロードロック室に対して試料を受け渡す第１受渡位置Ｐと、ステージに対して試料を受け渡す第２受渡位置Ｐ２と、所定の退避位置Ｐ３との間で移動自在に構成した。【選択図】図１