OBJECT SHAPE MEASUREMENT METHOD, OBJECT SHAPE MEASUREMENT DEVICE, OPTICAL PHASE MEASUREMENT METHOD AND OPTICAL PHASE MEASUREMENT DEVICE

PROBLEM TO BE SOLVED: To provide an object shape measurement method that enables a measurement of a surface shape of an object possible to contain a height difference exceeding a wavelength of light to be used without conducting phase connections.SOLUTION: From first object light and first reference light of a first wavelength including information on a surface shape of an object, a first interference fringe and second interference fringe are actually created, and a third interference fringe and fourth interference fringe are virtually created, and then, intensity distributions of these four interference fringes are obtained. From the intensity distributions of the four interference fringes, a first phase distribution is calculated that is included in the first object light. From second object light and second reference light of a second wavelength including information on a surface shape of an object, a fifth interference fringe and sixth interference fringe are actually created, and a seventh interference fringe and eighth interference fringe are virtually created, and then, intensity distributions of these four interference fringes are obtained. From the intensity distributions of the four interference fringes, a second phase distribution is calculated that is included in the second object light. From the first phase distribution and second phase distribution, a depth distribution is calculated that represents the surface shape of the object .SELECTED DRAWING: Figure 1 【課題】位相接続をすることなく、使用する光の波長を超える高低差を含みうる物体の表面形状を測定できる物体形状測定方法を提供すること。【解決手段】物体の表面形状の情報を含む第１波長の第１物体光と第１参照光とから、第１干渉縞および第２干渉縞を実際に生成し、第３干渉縞および第４干渉縞を仮想的に生成し、これら４枚の干渉縞の強度分布を得る。これら４枚の干渉縞の強度分布から前記第１物体光に含まれる第１位相分布を算出する。物体の表面形状の情報を含む第２波長の第２物体光と第２参照光とから、第５干渉縞および第６干渉縞を実際に生成し、第７干渉縞および第８干渉縞を仮想的に生成し、これら４枚の干渉縞の強度分布を得る。これら４枚の干渉縞の強度分布から前記第２物体光に含まれる第２位相分布を算出する。前記第１位相分布および前記第２位相分布から、物体の表面形状を表す深さ分布を算出する。【選択図】図１