GLASS PLATE FOR IMPRINT MOLD, LAMINATED PLATE FOR IMPRINT MOLD, AND IMPRINT MOLD

PROBLEM TO BE SOLVED: To provide a glass plate for an imprint mold capable of improving dimension accuracy of an opening pattern formed in a transfer material.SOLUTION: Disclosed is a glass plate for an imprint mold in which, on one main surface, a substantially rectangular protruding surface is provided whose periphery is surrounded by a step and which further protrudes than the periphery. In a substantially rectangular area excluding a portion within 1.5 mm from the outer peripheral edge of the protruding surface out of the protruding surface, out of area waviness which is measured from one end of the area to the other end of the area in a direction parallel to one side of the area, the size of the maximum height difference of a frequency component in a wavelength range of 50 μm or more and 50 mm or less is equal to or less than 10 nm.SELECTED DRAWING: Figure 5 【課題】転写材に形成される開口パターンの寸法精度を向上できる、インプリントモールド用ガラス板の提供。【解決手段】一方の主表面に、周囲を段差で取り囲まれ周囲よりも突出する略矩形状の突出面を有する、インプリントモールド用ガラス板であって、前記突出面のうち前記突出面の外周縁から１．５ｍｍ以内の部分を除く略矩形状の領域において、前記領域の一辺に対し平行な方向に前記領域の一端から前記領域の他端まで測定した前記領域のうねりのうちの、５０μｍ以上５０ｍｍ以下の波長範囲の周波数成分の最大高低差の大きさが１０ｎｍ以下である、インプリントモールド用ガラス板。【選択図】図５