PHOTORESIST STRIPPER

PROBLEM TO BE SOLVED: To provide a photoresist stripper having high stripping properties and having excellent anti-corrosiveness against a plurality of metals (particularly copper or copper alloy, and tin or tin alloy).SOLUTION: This invention relates to a stripper comprising dimethyl sulfoxide, qua...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	NISHIJIMA YOSHITAKA
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a photoresist stripper having high stripping properties and having excellent anti-corrosiveness against a plurality of metals (particularly copper or copper alloy, and tin or tin alloy).SOLUTION: This invention relates to a stripper comprising dimethyl sulfoxide, quaternary ammonium hydroxide, maltol and creatinine. Preferably, the stripper comprises alkyleneamine and/or alkanolamine.SELECTED DRAWING: None 【課題】高いレジスト剥離性を有すると共に、複数金属（特に銅又は銅合金、及び、錫又は錫合金）に対する防食性に優れたフォトレジスト剥離液を提供すること。【解決手段】ジメチルスルホキシド、水酸化第四級アンモニウム、マルトール及びクレアチニンを含むことを特徴とする剥離液に関する。さらに、アルキレンアミン及び／又はアルカノールアミンを含むことが好ましい。【選択図】なし