POSITIONING DEVICE AND POSITIONING METHOD

PROBLEM TO BE SOLVED: To provide a positioning device and positioning method that are large in rigidity in vertical direction, low in center of gravity, and thereby are resistant to oscillation in the vertical direction and lateral direction.SOLUTION: A positioning device 1 comprises: a first stage unit 23 that is provided on a surface plate 10, and is movable in one direction in an in-plane parallel with a top surface 11 of the surface plate 10 with respect to the surface plate 10; a second stage unit 33 that is provided on the first stage unit 23, and is movable in a second direction crossing the first direction in the in-plane with respect to the first stage unit 23; and a suction block 40 that is provided on the surface plate 10. The suction block 40 includes: a main body section 41; a suction pad that is provided on a lower surface of the main body section 41; and an elastic body 43 that is provided on a lateral surface of the main body section 41, and is connected to the second stage unit 33.SELECTED DRAWING: Figure 1 【課題】上下方向の剛性が大きく、重心が低いため、上下方向及び横方向の振動に強い位置決め装置及び位置決め方法を提供する。【解決手段】位置決め装置１は、定盤１０上に設けられ、定盤１０に対して、定盤１０の上面１１に平行な面内における第一方向に移動可能な第一ステージ部２３と、第一ステージ部２３上に設けられ、第一ステージ部２３に対して、面内における第一方向と交差する第二方向に移動可能な第二ステージ部３３と、定盤１０上に設けられた吸着ブロック４０と、を備え、吸着ブロック４０は、本体部４１と、本体部４１の下面に設けられた吸着パッドと、本体部４１の側面に設けられ、第二ステージ部３３と接続した弾性体４３と、を有する。【選択図】図１