LASER SHAPE MEASUREMENT DEVICE AND METHOD

PROBLEM TO BE SOLVED: To provide a laser shape measurement device in which position resolution is improved while suppressing an increase in calculation volume.SOLUTION: According to an embodiment of the invention, a laser shape measurement device comprises: a reconfiguration arithmetic unit 14 for calculating a spheroid whose focal point is constituted by a first scattered point at which a laser beam radiated from a laser source 1 is scattered on a scattering plane and a third scattering point generated by being scattered again on the scattering plane past a second scattering point at which the same is scattered on a measurement object plane and whose long side is constituted by an optical path length, as well as virtually dividing a measurement space by a rectangle and generating a voxel, and weighing a voxel which the surface of the spheroid passes through; a measurement object extraction unit 15 for comparing the weight assigned to each voxel by the reconfiguration arithmetic unit 14 with a preset upper-limit threshold and specifying a voxel that is assigned a weight greater than or equal to the upper-limit threshold; and a resolution enhancement unit 16 for subdividing the voxel specified by the measurement object extraction unit 15.SELECTED DRAWING: Figure 1 【課題】計算量の増大を抑制しながら位置分解能の向上を図ったレーザ形状計測装置を提供する。【解決手段】実施形態によれば、レーザ形状計測装置は、レーザ光源１から照射したレーザ光が散乱用平面で散乱する第１の散乱点と、計測対象物面で散乱する第２の散乱点を経てから散乱用平面で再度散乱して生じる第３の散乱点とを焦点とし、かつ光路長を長辺とする長球を算出するとともに、計測空間を仮想的に長方形で区切ってボクセルを生成し、長球の表面が通過するボクセルに重み付けする再構成演算部１４と、再構成演算部１４で各ボクセルに付与された重みとあらかじめ設定された上限閾値とを比較し、上限閾値以上の重みが付与されたボクセルを特定する計測対象物抽出部１５と、計測対象物抽出部１５で特定されたボクセルを細分化する高解像度化部１６と、を備える。【選択図】図１