METHOD OF REPAIRING ALUMINUM NITRIDE DIELECTRIC OF ELECTROSTATIC CHUCK

PROBLEM TO BE SOLVED: To provide a repaired electrostatic chuck and a method of repairing a used electrostatic chuck.SOLUTION: Initially, a predetermined amount of dielectric material is removed from a used electrostatic chuck to leave a base surface. Then, the base surface is roughened to enhance a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JOSEPH F SOMMERS, WENDELL G BOYD JR, WILLIAM M LU, RAJAN BALESAN
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL BASIC ELECTRIC ELEMENTS CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION GRINDING PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES TRANSPORTING
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