GLASS SHEET FOR IMPRINT MOLD AND MANUFACTURING METHOD OF GLASS SHEET FOR IMPRINT MOLD

PROBLEM TO BE SOLVED: To provide a glass sheet for imprint mold suitable for correction of uneven pattern.SOLUTION: There is provided a glass sheet for imprint mold having a non-through hole in a center part of one main surface and an average value of an angle with a processing phase axis of birefri...

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Hauptverfasser: OTA SEIGO, NAKAMURA HIROTO, KUMAGAI HIROHIKO
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a glass sheet for imprint mold suitable for correction of uneven pattern.SOLUTION: There is provided a glass sheet for imprint mold having a non-through hole in a center part of one main surface and an average value of an angle with a processing phase axis of birefringence measured by irradiating light to the main surface vertically and a linear connecting a measurement point of the processing phase axis and a center point of the main surface of more than 45° and 90° or less in a measurement range of 5 mm or more inside from an outer peripheral edge of the main surface and 5 mm or more outside from an opening edge of the non-through hole.SELECTED DRAWING: Figure 13 【課題】凹凸パターンの矯正に適した、インプリントモールド用ガラス板の提供。【解決手段】一方の主表面の中央部に非貫通穴を有しており、前記主表面の外周縁から5mm以上内側、且つ、前記非貫通穴の開口縁から5mm以上外側の測定領域において、前記主表面に対し垂直に光を照射することで測定した複屈折の進相軸と、前記進相軸の測定点と前記主表面の中心点とを結ぶ直線とのなす角の平均値が45°よりも大きく90°以下である、インプリントモールド用ガラス板。【選択図】図13