FILM EXTENSION DEVICE AND MANUFACTURING METHOD FOR ELECTRONIC COMPONENT USING THE SAME

PROBLEM TO BE SOLVED: To provide an extension device of excellent in productivity, and capable of increasing the number of chips that can be processed in one extension step, and to provide a manufacturing method for electronic component using the extension device and having high productivity.SOLUTION: A film extension device for extending a film 1, to which a plurality of chips are stuck, in the plane direction includes: a holding portion 2 for holding a peripheral portion 1a of the film 1; a frame 3 located on the inside of the holding portion 2, in the plan view, and becoming an extension fulcrum when extending the film 1 held by the holding section 2 in the plane direction; and a heating table located on the inside of the frame 3, in the plan view, having a planar area smaller than the inside region of the frame 3, and having an abutment portion 6 for heating a predetermined region on the inside of the frame 3 of the film 1 by abutting against the lower surface thereof. A size Din one predetermined direction, i.e., an X direction, of the surface of the abutment portion 6 abutting against the lower surface of the film is differentiated from a size Din the other direction orthogonal to the one direction, i.e., a Y direction.SELECTED DRAWING: Figure 10 【課題】一度の拡張工程で処理できるチップの個数を増やすことが可能で、生産性に優れたフィルムの拡張装置および該拡張装置を用いた生産性の高い電子部品の製造方法を提供する。【解決手段】複数のチップが貼り着けられたフィルム１を面方向に拡張するためのフィルム拡張装置において、フィルム１の周縁部１ａを保持する保持部２と、平面視で保持部２の内側に位置し、保持部２により保持されたフィルム１を面方向に拡張する際に拡張支点となる枠体３と、平面視で枠体３の内側に位置し、枠体３の内側領域よりも平面面積が小さく、フィルム１の下面と当接してフィルム１の枠体３の内側における所定領域を加熱する当接部６を有する加熱テーブルとを備えた構成とする。当接部６の、フィルムの下面と当接する面の、所定の一方向であるＸ方向の寸法ＤXと、一方向と直交する他方向であるＹ方向の寸法ＤYとが異なるようにする。【選択図】図１０