SENSOR AND JOINT STRUCTURE

PROBLEM TO BE SOLVED: To provide a sensor that is not susceptible to ablation even when it is used in a state in which it is joined to a substrate, and a joint structure using the same.SOLUTION: The sensor comprises: a support part which is shaped like a frame that is opened from an upper-side principal surface through a lower-side principal surface and connected to a base plate 1 so that the lower-side principal surface faces the external base plate, a movable part located inside of the support part, a connection part having flexibility that connects the support part and the movable part, and a detection part located in the connection part. The outside surface of the support part is provided with a first portion and a second portion located downward of the first portion and protruding outward from the first portion.SELECTED DRAWING: Figure 1 【課題】 基板に接合した状態で使用しても、剥離が生じ難いセンサおよびそれを用いた接合構造体を提供する。【解決手段】 センサは、上側主面から下側主面にかけて開口した枠状体であって、下側主面が外部の基板に対向するように基板１に接合される支持部と、支持部の内側に位置する可動部と、支持部と可動部とを接続する可撓性を有する接続部と、接続部に位置する検出部とを具備している。支持部の外側面は、第１の部位および第１の部位よりも下側に位置するとともに第１の部位よりも外側に突出した第２の部位を具備している。【選択図】 図１