IRRADIATION APPARATUS

PROBLEM TO BE SOLVED: To provide an irradiation apparatus that is simple in configuration and can prevent the breakage of a mask.SOLUTION: The irradiation apparatus comprises a mask holder 5 for holding a mask 50 for light-blocking a prescribed area of a workpiece against gravity between an irradiat...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	MURAMOTO KOSUKE
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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