SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM

PROBLEM TO BE SOLVED: To prevent a processing liquid scattering from a substrate to the outside of a fixed cup body from adhering to a chamber inner wall.SOLUTION: A substrate processing device includes: a fixed cup body (51) which is immovable relative to a processing container which encloses a sub...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TOJIMA JIRO, OTSUKA TAKAHISA, AIURA KAZUHIRO, ITO KIKO, OGATA NOBUHIRO, MICHIKI YUICHI, HASHIMOTO YUSUKE, GOTO DAISUKE
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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