MEMS TYPE LITHIUM ION BATTERY AND SEMICONDUCTOR/MEMS INTEGRATED CIRCUIT INCORPORATED WITH THE BATTERY

PROBLEM TO BE SOLVED: To provide a lithium ion battery capable of being manufactured using a semiconductor technology and a MEMS technology, capable of being miniaturized by being integrated together with a sensor, an electronic circuit, and an environment power generating device, having a sufficient power storage capacity, and contributing to the miniaturization of a wearable device or the like.SOLUTION: A lithium ion battery includes deep grooves 600, 650 in a crystal substrate 651 such as Si, an active material 656 of at least one of electrodes being embedded in the groove 650. The lithium ion battery has a structure for providing a cavity 698 with a constant space between the active material 656 and an active material 606 of the other electrode. The cavity 698 with a constant space includes, at one surface of the substrate 651, at least one opening for injecting an electrolyte and at least one opening for gas vent. In addition, the electrolyte is injected through the opening into the cavity 698 with a constant space. The structure is sealed at a temperature that does not cause a deterioration in the electrolyte.SELECTED DRAWING: Figure 6(a) 【課題】半導体技術やMEMS技術を用いて製造可能で、センサ、電子回路、環境発電デバイスとともに集積化することで小型化が可能であり、十分な蓄電容量を持ち、ウェアラブル機器等の小型化に資するリチウムイオン電池の提供。【解決手段】Si等の結晶基板６５１に深い溝６００、６５０を有し、溝６５０内に少なくとも一方の電極の活物質６５６が埋め込まれており、もう一方の電極の活物質６０６との間に一定間隔の空洞６９８を設けるための構造を有し、一定間隔の空洞６９８は基板６５１のどちらか一方の表面に少なくとも一つの電解液を注入するための開口部と、少なくとも一つの気体抜きのための開口部を有し、さらに、一定間隔の空洞６９８には開口部より電解液が注入され、電解液が劣化しない程度の温度で封止されたリチウムイオン電池。【選択図】図６(a)