METHOD FOR INSPECTING VALVE LEAK IN GAS SUPPLY SYSTEM

PROBLEM TO BE SOLVED: To inspect leak of valves provided on a plurality of pipes connected to a plurality of gas sources.SOLUTION: In a method of one embodiment, a first valve provided on a first pipe connected to a gas source is closed, and a second valve provided on the first pipe on the downstrea...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	AMIKURA NORIHIKO, SAWACHI JUN
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MEASURING METALLURGY PHYSICS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To inspect leak of valves provided on a plurality of pipes connected to a plurality of gas sources.SOLUTION: In a method of one embodiment, a first valve provided on a first pipe connected to a gas source is closed, and a second valve provided on the first pipe on the downstream of the first valve is opened. Then, a pressure rise is detected by a pressure gauge on the downstream of the first pipe. Further, the first valve is opened, and the second valve is closed. Then, a pressure rise is detected by the pressure gauge on the downstream of the first pipe.SELECTED DRAWING: Figure 7 【課題】複数のガスソースに接続された複数の配管に設けられているバルブのリークを検査する。【解決手段】一実施形態の方法では、ガスソースに接続されている第１の配管に設けられている第１のバルブが閉じられ、当該第１のバルブの下流において第１の配管に設けられている第２のバルブが開かれる。そして、第１の配管の下流において圧力計により圧力上昇が検出される。また、第１のバルブが開かれ、第２のバルブが閉じられる。そして、第１の配管の下流において圧力計により圧力上昇が検出される。【選択図】図７