MEASUREMENT BOARD AND PROFILOMETER

PROBLEM TO BE SOLVED: To provide a measurement board and a profilometer that can reduce errors of measurement values in measurement of a measurement target object and can increase the accuracy of measurement even if a laser displacement meter which is cheap and has a low resolution is used.SOLUTION: The present invention relates to a measurement board 30 for placing a measurement target object 100 on the surface, of a profilometer used for measuring the surface shape of the measurement target object by allowing a laser displacement meter 41 capable of measuring a distance to the measurement target object by a laser light to make a surface of the measurement target object relatively scan while irradiating the surface shape thereof with a laser light. The measurement board has a recess 30a recessed in a position lower than at least a measurement position of the measurement target object irradiated with the laser light more than the other regions not including the measurement position, or a through-hole.SELECTED DRAWING: Figure 1 【課題】測定対象物を測定する際の測定値の誤差を減少できるとともに、安価で分解能が低いレーザ変位計を用いた場合であっても測定の精度を向上させる測定台および表面形状測定装置を提供する。【解決手段】レーザ光によって測定対象物１００までの距離を測定可能なレーザ変位計４１を測定対象物の表面に対してレーザ光を照射しつつ相対的に走査させることによって、測定対象物の表面形状を測定する表面形状測定装置における、測定対象物を載置する測定台３０であって、少なくともレーザ光が照射される測定対象物の測定位置に対応する位置の下方が、測定位置を含まない他の領域より凹んだ凹部３０ａ、または貫通した貫通口である。【選択図】図１