IONIZATION VACUUM GAGE AND PRESSURE MEASURING METHOD

PROBLEM TO BE SOLVED: To provide an ionization vacuum gage which reduces stress of an electron source without suffering from damage from sputtering in operation at various pressure levels, a pressure measuring method using such the ionization vacuum gage, and various methods in a vacuum gas atmosphe...

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Hauptverfasser:	CARMICHAEL RALLY K, MICHAEL N SCHOTT, GERANDO A BRUCKER, JESSE A WEBER, JOHN H HENRY, KENNETH D VAN ANTWERP
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an ionization vacuum gage which reduces stress of an electron source without suffering from damage from sputtering in operation at various pressure levels, a pressure measuring method using such the ionization vacuum gage, and various methods in a vacuum gas atmosphere.SOLUTION: An ionization vacuum gage 100 comprises: an electron source 105 that emits electrons 125; an anode 120 that forms an ionization space; and a collector electrode 110 to collect ions generated by impact between the electrons and gas in the ionization space. In addition, a controller 105a actively controls emission current from the electron source 105 during operation in response to detection parameters other than pressure.SELECTED DRAWING: Figure 1 【課題】電子源の歪力を軽減しながら、様々な圧力レベルでの動作において、スパッタリングによる損傷を受けることがない電離真空計、そのような電離真空計を使用した圧力測定方法、および真空の気体雰囲気内での各種方法を提供する。【解決手段】本発明の電離真空計１００は、電子１２５を放出する電子源１０５と、イオン化空間を形成する陽極１２０と、電子とイオン化空間における気体との衝突によって生成されるイオンを収集する収集電極１１０とを備える。なお、コントローラ１０５ａにより、動作時の電子源１０５からの放出電流を、圧力以外の検出パラメータに応答して能動的に制御するように構成されている。【選択図】図１