IN-POWDER FOREIGN MATTER DETECTION DEVICE AND FOREIGN MATTER DETECTION METHOD USING TERAHERTZ PULSE WAVE

PROBLEM TO BE SOLVED: To provide an in-powder foreign matter detection device and foreign matter detection method, using terahertz pulse wave, that can accurately detect foreign matter in powder.SOLUTION: A foreign matter detection device comprises: an oscillation part 11 which generates and emits a terahertz wave as irradiation light; an optical system 12 which guides the irradiation light to powder and converges reflected light and/or transmitted light from the powder; a reception part 13 which outputs a signal corresponding to the converged reflected light and/or the transmitted light; a scanning mechanism 14 which scans the position on the powder to which the irradiation light is guided; and an arithmetic part 15 which detects foreign matter 21 in the powder based upon at least one of a time waveform signal output in time series from the reception part, a reflected image, a power spectrum, and a frequency image.SELECTED DRAWING: Figure 2 【課題】粉末の中の異物を正確に検出可能な、テラヘルツパルス波を用いた粉末中の異物検出装置および異物検出方法を提供する。【解決手段】テラヘルツパルス波を発生して照射光として発する発振部１１と、前記照射光を粉末に導くとともにこの粉末からの反射光および／または透過光を集光する光学系１２と、集光された前記反射光および／または前記透過光に応じた信号を出力する受信部１３と、前記照射光が導かれる前記粉末上での位置を走査する走査機構１４と、前記受信部から時系列的に出力される時間波形信号、反射画像、パワースペクトル、および周波数画像の少なくとも１つに基づいて、前記粉末中の異物２１を検出する演算部１５とを備える。【選択図】図２