SUSCEPTOR ARRANGEMENT FOR REACTOR AND METHOD OF HEATING PROCESS GAS FOR REACTOR

PROBLEM TO BE SOLVED: To provide a susceptor arrangement having increased heat transfer efficiency for a reactor.SOLUTION: A susceptor arrangement for a reactor includes a heater element configured to heat a process gas to be used in the reactor. The susceptor arrangement also includes an inner susc...

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Bibliographische Detailangaben

1. Verfasser:	MICHAEL MATTHEW ZALAR
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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