SPINDLE DESCENT DISTANCE INFORMATION DETECTION MECHANISM AND SUBSTRATE PROCESSING DEVICE WITH SPINDLE DESCENT DISTANCE INFORMATION DETECTION MECHANISM BUILT IN

PROBLEM TO BE SOLVED: To prevent a drill from being damaged by removing disturbance factors etc., and accurately detecting whether the drill comes into contact with a desired conductor layer, and also preventing a harmonic current from flowing to the drill, when a bore hole is made down to a desired conductor layer of a substrate by drilling with a spindle.SOLUTION: There is provided a descent distance information detection mechanism having a high-frequency AC power supply, a bypass circuit including at least a reactor, a canceling circuit, and a current transformer for high harmonic which has an input winding and a canceling winding having the same number of turns and connected in opposite winding directions, and one or more output windings. Magnetic flux generated at the input winding owing to disturbance factors and magnetic flux generated at the canceling winding by the canceling circuit cancel each other, and no current is generated on an output winding side of the current transformer, so descent distance information on a spindle can be precisely determined, and the bypass circuit prevents a harmonic current etc., from flowing to a drill, thereby preventing the drill from being damaged.SELECTED DRAWING: Figure 1 【課題】スピンドルのドリルによって、基板の所望の導体層まで正確に穿孔しようとする際、外乱要因等をなくしてドリルの所望の導体層への接触の有無を的確に検出可能とするとともに、ドリルへの高調波電流の流入を防止して、ドリルの損傷を防止する。【解決手段】高周波交流電源と、少なくともリアクタを含むバイパス回路と、キャンセル回路と、巻数が同じで逆巻となって接続する入力巻線とキャンセル巻線と１個以上の出力巻線を持つ高周波用の変流器を有する下降距離情報検出機構を設けて、外乱要因によって入力巻線に生じる磁束と、キャンセル回路によってキャンセル巻線に生じる磁束とを打ち消し合わせ、変流器の出力巻線側に電流を発生れることがないので、スピンドルの下降距離 情報を精度よく判定できるとともに、バイパス回路によって、ドリルへの高調波電流等の流入を防止して、ドリルの損傷を防止することができる。【選択図】図１