WAVE FRONT ABERRATION MEASUREMENT METHOD, WAVE FRONT ABERRATION MEASUREMENT DEVICE, REFRACTIVE INDEX DISTRIBUTION MEASUREMENT METHOD, AND REFRACTIVE INDEX DISTRIBUTION MEASUREMENT DEVICE

PROBLEM TO BE SOLVED: To highly accurately measure transmitted wave front of a specimen.SOLUTION: A wave aberration measuring method includes steps of: measuring transmitted wave front in a state in which a specimen is not placed; calculating a designed value of the transmitted wave front without pl...

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Bibliographische Detailangaben
1. Verfasser:	KATO MASAKIYO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	MEASURING PHYSICS TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
Online-Zugang:	Volltext bestellen
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Zusammenfassung:	PROBLEM TO BE SOLVED: To highly accurately measure transmitted wave front of a specimen.SOLUTION: A wave aberration measuring method includes steps of: measuring transmitted wave front in a state in which a specimen is not placed; calculating a designed value of the transmitted wave front without placing the specimen; and changing information regarding a measurement system according to a difference between the transmitted wave front measured in the state in which the specimen is not placed and the designed value of the transmitted wave front without placing the specimen.SELECTED DRAWING: Figure 2 【課題】被検物の透過波面を高精度に計測する。【解決手段】被検物を配置しない状態で透過波面を計測するステップと、被検物を配置しないときの透過波面の設計値を計算するステップと、被検物を配置しない状態で計測された透過波面と被検物を配置しないときの透過波面の設計値の差に基づいて、計測系に関する情報を変更するステップを含むことを特徴とする波面収差計測方法。【選択図】図２