THREE-DIMENSIONAL INFORMATION ACQUISITION APPARATUS AND THREE-DIMENSIONAL INFORMATION ACQUISITION METHOD

PROBLEM TO BE SOLVED: To provide a technique for quickly acquiring high-accuracy three-dimensional information.SOLUTION: A three-dimensional information acquisition apparatus 100 comprises: an illumination optical system 11 illuminating a sample S through an optical sheet LL; an imaging device (imaging device 14a, imaging device 14b) including a two-dimensional imaging element and imaging the sample S illuminated by the illumination optical system 11; an observation optical system (observation optical system 13a, observation optical system 13b) forming a plurality of optical images of the sample S observed from a plurality of different directions on the two-dimensional imaging element; and a computer 18 calculating three-dimensional information of a plurality of pieces of image data of the sample S generated by the imaging device. D≤8*PP/β/NA is satisfied when PP>λ*β/(4*NA) is satisfied, where D represents the depth of the optical sheet LL, PP represents the pixel size of the imaging element, λ represents the wavelength of observation light from the sample S, β represents a magnification of optical image formed on the imaging element by the observation optical system, and NA represents the numerical aperture of the observation optical system on the object side.SELECTED DRAWING: Figure 7 【課題】高精度の３次元情報を高速に取得する技術を提供する。【解決手段】３次元情報取得装置１００は、光シートＬＬで試料Ｓを照明する照明光学系１１と、２次元撮像素子を有し照明光学系１１に照明された試料Ｓを撮像する撮像装置（撮像装置１４ａ、撮像装置１４ｂ）と、複数の異なる方向から観察した試料Ｓの複数の光学像を２次元撮像素子上に形成する観察光学系（観察光学系１３ａ、観察光学系１３ｂ）と、撮像装置で生成された試料Ｓの複数の画像データから試料の３次元情報を算出するコンピュータ１８を備える。光シートＬＬの厚さＤは、ＰＰを撮像素子の画素サイズ、λを試料Ｓからの観察光の波長、βを観察光学系によって撮像素子上に形成される光学像の倍率、ＮＡを観察光学系の物体側の開口数とし、ＰＰ＞λ・β／（４・ＮＡ）を満たすとき以下を満たす。Ｄ ≦ ８・ＰＰ／β／ＮＡ【選択図】図７