REFLECTION TYPE ENCODER
PROBLEM TO BE SOLVED: To provide an encoder in which a receiver mounted at a narrow pitch with a laser beam transmission part can be irradiated surely, even when a diffraction grating pitch of a code wheel is narrowed, concerning a reflection type encoder.SOLUTION: An interference optical system hav...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an encoder in which a receiver mounted at a narrow pitch with a laser beam transmission part can be irradiated surely, even when a diffraction grating pitch of a code wheel is narrowed, concerning a reflection type encoder.SOLUTION: An interference optical system having a transmission grating having the same pitch as a reflection type diffraction grating is interposed between a sub-mount on which a laser oscillator and a receiver are mounted, and a code wheel provided with the reflection type diffraction grating, and thereby the receiver can be irradiated surely with re-incident light returning through the code wheel.SELECTED DRAWING: Figure 4
【課題】反射型エンコーダに於いて、コードホイールの回折格子ピッチが狭くなっても、レーザー光発信部と狭ピッチに実装された受光部に確実に照射されるエンコーダを提供する。【解決手段】レーザー発振器及び受光部を取り付けたサブマウントと反射型回折格子を設けたコードホイールとの間に、当該反射型回折格子と同ピッチの透過型回折格子を有する干渉光学系を挟むことで、前記コードホイールを介して戻ってくる再入射光を前記受光部へと確実に照射することが可能となる。【選択図】 図4 |
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