SURFACE PROFILE DISTORTION MEASUREMENT DEVICE AND MEASUREMENT METHOD OF SURFACE PROFILE DISTORTION

PROBLEM TO BE SOLVED: To provide a surface profile distortion measurement device capable of measuring a fine surface profile distortion in a wide range and hardly affected even by variation of the installation distance of an object to be measured and a measurement method of a surface profile distortion.SOLUTION: A surface profile distortion measurement device includes: an illumination source 3 for illuminating linear diffusion light on a surface 2 to be measured; a camera 4 for photographing a regular reflection image by the surface to be measured that fixes a relative position to the illumination source; image processing means for detecting a relative inclination of each reflection point by the photographed regular reflection image; a movement mechanism 6 for moving on an axis by mounting the illumination source 3 and the camera 4; and an encoder for outputting a moving amount. The surface profile distortion measurement device includes means for calculating curvature from the change of the inclination by detecting the inclination of each reflection point by performing in order the photographing while being moved by the movement mechanism 6, and means for displaying the distribution of the curvature of the calculated surface to be measured. The image processing means, the calculation means of the curvature, the display means of the curvature distribution are incorporated into a personal computer 5.SELECTED DRAWING: Figure 1 【課題】広い範囲で微小な面形状の歪みの測定が可能で、被測定物の設置距離の変動にも影響を受けにくい面形状歪測定装置および面形状歪の測定方法を提供する。【解決手段】被測定面２に直線状の拡散光を照射する照明光源３と、これに対する相対位置を固定した被測定面による正反射像を撮影するカメラ４と、撮影された正反射像により各反射点の相対的な傾きを検出する画像処理手段と、照明光源３およびカメラ４を搭載して１軸上を移動する移動機構６と、移動量を出力するエンコーダとを備え、移動機構６により移動させながら撮影を順次行うことにより各反射点の傾きを検出し、その傾きの変化から曲率を算出する手段と、算出された被測定面の曲率の分布を表示する手段とを備える。上記の画像処理手段、曲率の算出手段、曲率分布の表示手段はパーソナルコンピュータ５に内蔵されている。【選択図】図１