OPTICAL DEVICE HAVING DEFORMABLE OPTICAL ELEMENT

PROBLEM TO BE SOLVED: To provide an optical device capable of actively deforming at least one optical element particularly in a simple manner so as to achieve a rapid correction of an imaging error, and thereby, giving an imaging quality that is continuously as high as possible with a high throughpu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MANFRED STEINBACH, ARMIN SCHOEPPACH
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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