METHOD OF MANUFACTURING LIQUID CRYSTAL DEVICE, THE LIQUID CRYSTAL DEVICE, AND ELECTRONIC APPARATUS

PROBLEM TO BE SOLVED: To provide a method of manufacturing a liquid crystal device which has excellent humidity resistance and alignment stability, while further improving light resistance lifetime.SOLUTION: A method of manufacturing a liquid crystal device in which a liquid crystal layer is held between a pair of substrates, includes in the following order: a step S101 for forming an inorganic alignment layer on a surface of a side facing at least one of the pair of substrates; a step S102 for forming a first organic silane layer in which an existence ratio of a first silane coupling material is higher in the inside than on a surface of the inorganic alignment layer, by carrying out liquid phase treatment of the inorganic alignment layer using the first silane coupling material; and a step S103 for forming a second organic silane layer in which an existence ratio of a second silane coupling material is higher on a surface than in the inside of the inorganic alignment layer, by carrying out gas phase treatment of the inorganic alignment layer using the second silane coupling material which has greater molecular weight than the first silane coupling material.SELECTED DRAWING: Figure 6 【課題】耐光性寿命の更なる向上を図りつつ、耐湿性及び配向安定性に優れた液晶装置の製造方法を提供する。【解決手段】一対の基板間に液晶層が挟持された液晶装置の製造方法であって、一対の基板の少なくとも一方の液晶層と対向する側の面に、無機配向膜を形成する工程Ｓ１０１と、第１のシランカップリング材を用いて、無機配向膜を液相で処理することにより、無機配向膜の表面よりも内部において第１のシランカップリング材の存在割合が大きい第１の有機シラン膜を形成する工程Ｓ１０２と、第１のシランカップリング材よりも分子量が大きい第２のシランカップリング材を用いて、無機配向膜を気相で処理することにより、無機配向膜の内部よりも表面において第２のシランカップリング材の存在割合が大きい第２の有機シラン膜を形成する工程Ｓ１０３とを、この順で含む。【選択図】図６