SPATIAL LIGHT MODULATOR AND METHOD FOR USING THE SAME, MODULATION METHOD, EXPOSURE METHOD AND APPARATUS, AND DEVICE MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To suppress the effect of light from gap regions of plural optical elements of a spatial light modulator.SOLUTION: The spatial light modulator comprises reflection parts 31 of plural mirror elements 30 arranged along a reference plane A1. The spatial light modulator modulates the phase of an incident illumination light beam IL and emits the light. The spatial light modulator further comprises wavelength plates 37Y and 37X, by which the polarization state of an illumination light beam IL3 which enters gap regions 34Y and 34X between two adjacent reflection parts 31 of the plural reflection parts 31 and exits from the gap regions 34Y and 34X is made different from the polarization state of illumination light beams IL1 and IL2 reflected off the reflection part 31.SELECTED DRAWING: Figure 3 【課題】空間光変調器の複数の光学要素の隙間領域からの光の影響を抑制する。【解決手段】基準平面Ａ１に沿って配列された複数のミラー要素３０の反射部３１を備え、入射する照明光ＩＬの位相を変調して射出する空間光変調器であって、その複数の反射部３１のうち、隣接する２つの反射部３１の間の隙間領域３４Ｙ，３４Ｘに入射して、その隙間領域３４Ｙ，３４Ｘから射出される照明光ＩＬ３の偏光状態を、反射部３１から反射される照明光ＩＬ１，ＩＬ２の偏光状態と異ならせる波長板３７Ｙ，３７Ｘを備える。【選択図】図３