STATIC PRESSURE GAS BEARING

PROBLEM TO BE SOLVED: To reduce or prevent a leak of gas from joint surfaces of plate-like members that constitute a slider in a static pressure gas bearing to be used under a vacuum environment.SOLUTION: A static pressure gas bearing to be used under a vacuum environment comprises: a guide shaft; a...

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Bibliographische Detailangaben
Hauptverfasser:	YOSHIDA TATSUYA, SAKAKI KAZUTOSHI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BEARINGS BLASTING ELEMENTS OR CRANKSHAFT MECHANISMS ENGINEERING ELEMENTS AND UNITS FLEXIBLE SHAFTS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING ROTARY BODIES OTHER THAN GEARING ELEMENTS SHAFTS THERMAL INSULATION IN GENERAL WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To reduce or prevent a leak of gas from joint surfaces of plate-like members that constitute a slider in a static pressure gas bearing to be used under a vacuum environment.SOLUTION: A static pressure gas bearing to be used under a vacuum environment comprises: a guide shaft; and a cylindrical slider 20 that can move in an axial direction while housing the guide shaft. The slider 20 is configured by fastening a plurality of plate-like members 20A-20D. Films 24 made of a soft material having a smaller elastic modulus than that of the plate-like members are interposed between joint surfaces of the plate-like members.SELECTED DRAWING: Figure 2 【課題】真空環境下で使用される静圧気体軸受において、スライダを構成する板状部材の接合面からの気体のリークを低減または防止する。【解決手段】真空環境下で使用される静圧気体軸受は、ガイド軸と、ガイド軸を収容しつつ軸方向に移動可能な筒状のスライダ２０と、を備える。スライダ２０は、複数の板状部材２０Ａ〜２０Ｄを締結することで構成されている。板状部材同士の接合面には、板状部材よりも弾性率が小さく柔らかい材料からなる膜２４が介在されている。【選択図】図２