METHOD AND SYSTEM FOR CONVERGENT POLISHING

PROBLEM TO BE SOLVED: To solve the following problem: full aperture lap polishing still requires highly skilled opticians using artisan techniques; this type of polishing typically requires multiple iterative cycles involving polishing, measuring, and adjusting parameters to converge to the desired...

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Hauptverfasser: PHILIP E MILLER, LANA L WONG, JEFFREY D BUDE, REBECCA J DYLLA-SPEARS, MICHAEL D FEIT, PAUL GERAGHTY, TAYYAB I SURATWALA, DANIEL C MASON, RICHARD P DESJARDIN, WILLIAM A STEELE
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creator PHILIP E MILLER
LANA L WONG
JEFFREY D BUDE
REBECCA J DYLLA-SPEARS
MICHAEL D FEIT
PAUL GERAGHTY
TAYYAB I SURATWALA
DANIEL C MASON
RICHARD P DESJARDIN
WILLIAM A STEELE
description PROBLEM TO BE SOLVED: To solve the following problem: full aperture lap polishing still requires highly skilled opticians using artisan techniques; this type of polishing typically requires multiple iterative cycles involving polishing, measuring, and adjusting parameters to converge to the desired surface figure (i.e. flatness or conformance to a specified radius).SOLUTION: A polishing system 1000 for polishing an optical element 1012 includes a polishing pad 1010 having a radial dimension and a septum 1014 disposed on the polishing pad 1010. The septum 1014 is configured to partially surround the optical element 1012. The optical element 1012 contacts the polishing pad 1010 over a range of the radial dimension and a pad wear rate of the polishing pad 1010 is substantially constant, as a function of radial dimension, over the range of the radial dimension.SELECTED DRAWING: Figure 10 【課題】フルアパーチャラップ研磨は、今も職人技術を使いこなす熟練した光学技術者が必要である。このタイプの研磨は、通常、研磨、測定、および所望の表面形状に収束させるためのパラメータ(すなわち、平面度または特定の半径への適合性)の調整を含む、複数回の反復サイクルを必要とする。【解決手段】光学素子1012を研磨するための研磨システム1000は、半径方向寸法を有する研磨パッド1010と、研磨パッド1010上に配置されるセプタム1014とを含む。セプタム1014は、光学素子1012を部分的に包囲するように構成される。光学素子1012は、半径方向寸法の範囲にわたって研磨パッド1010と接触し、研磨パッド1010のパッド摩耗率は、半径方向寸法の範囲にわたって、半径方向寸法の関数としてほぼ一定である。【選択図】図10
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The septum 1014 is configured to partially surround the optical element 1012. The optical element 1012 contacts the polishing pad 1010 over a range of the radial dimension and a pad wear rate of the polishing pad 1010 is substantially constant, as a function of radial dimension, over the range of the radial dimension.SELECTED DRAWING: Figure 10 【課題】フルアパーチャラップ研磨は、今も職人技術を使いこなす熟練した光学技術者が必要である。このタイプの研磨は、通常、研磨、測定、および所望の表面形状に収束させるためのパラメータ(すなわち、平面度または特定の半径への適合性)の調整を含む、複数回の反復サイクルを必要とする。【解決手段】光学素子1012を研磨するための研磨システム1000は、半径方向寸法を有する研磨パッド1010と、研磨パッド1010上に配置されるセプタム1014とを含む。セプタム1014は、光学素子1012を部分的に包囲するように構成される。光学素子1012は、半径方向寸法の範囲にわたって研磨パッド1010と接触し、研磨パッド1010のパッド摩耗率は、半径方向寸法の範囲にわたって、半径方向寸法の関数としてほぼ一定である。【選択図】図10</abstract><oa>free_for_read</oa></addata></record>
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subjects DRESSING OR CONDITIONING OF ABRADING SURFACES
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
PERFORMING OPERATIONS
POLISHING
TRANSPORTING
title METHOD AND SYSTEM FOR CONVERGENT POLISHING
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