HIGH-FREQUENCY MATCHING SYSTEM

PROBLEM TO BE SOLVED: To achieve impedance matching using a characteristic parameter showing a transmission characteristic of the whole impedance adjustment device even when a high-frequency power supply 1v of variable frequency system is used.SOLUTION: An impedance adjustment device 3A is applied t...

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Bibliographische Detailangaben
Hauptverfasser:	SUITO MASAKATSU, SHIMOMOTO TAKASHI, ITAYA KOJI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS BASIC ELECTRONIC CIRCUITRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS RESONATORS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To achieve impedance matching using a characteristic parameter showing a transmission characteristic of the whole impedance adjustment device even when a high-frequency power supply 1v of variable frequency system is used.SOLUTION: An impedance adjustment device 3A is applied to a high-frequency power supply system using a high-frequency power supply 1v. A characteristic parameter targetting part of a combination of positional information C of a variable capacitor 21 and output frequency information F of the high-frequency power supply 1v is stored in a memory 70. A control part 100 identifies target combination information bringing a reflection coefficient of an output terminal obtained by calculation near a target input reflection coefficient on the basis of the reflection coefficient of the output terminal and the target input reflection coefficient and performs impedance matching on the basis of the information.SELECTED DRAWING: Figure 1 【課題】可変周波数方式の高周波電源１ｖを用いる場合でも、インピーダンス調整装置全体の伝送特性を示す特性パラメータを用いてインピーダンス整合を行う。【解決手段】インピーダンス調整装置３Ａは、可変周波数方式の高周波電源１ｖを用いた高周波電力供給システムに適用される。可変コンデンサ２１の位置情報Ｃと高周波電源１ｖの出力周波数情報Ｆとの組み合わせの一部を対象とした特性パラメータがメモリ７０に記憶される。制御部１００は演算によって得られた出力端の反射係数と目標入力反射係数とに基づいて、出力端における反射係数を目標入力反射係数に近づける目標組み合わせ情報を特定し、この情報に基づいてインピーダンス整合させる。【選択図】図１