PROTECTIVE COVER AND SUBSTRATE PROCESSING DEVICE USING THE SAME
PROBLEM TO BE SOLVED: To provide a protective cover capable of reliably preventing a fork of a substrate transfer device from being damaged during maintenance and after maintenance, and a substrate processing device using the protective cover.SOLUTION: A protective cover 140 for protecting a fork 61...
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Patent |
| Sprache: | eng ; jpn |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a protective cover capable of reliably preventing a fork of a substrate transfer device from being damaged during maintenance and after maintenance, and a substrate processing device using the protective cover.SOLUTION: A protective cover 140 for protecting a fork 61 of a substrate transfer device 200 includes: a cover body 110 through which the fork can be visually recognized from the outside when the fork is covered; and a light blocking plate 120 mounted to the cover body and capable of blocking light of an opposing-type photodetector 65 mounted to each of a pair of fingers of the fork when the protective cover covers the fork.SELECTED DRAWING: Figure 5
【課題】本発明は、メインテナンス中及びメインテナンス後に、基板搬送装置のフォークの破損を確実に防止できる保護カバー及びこれを用いた基板処理装置を提供することを目的とする。【解決手段】基板搬送装置２００のフォーク６１を保護する保護カバー１４０であって、前記フォークを覆ったときに、前記フォークを外部から視認可能なカバー体１１０と、該カバー体に取り付けられ、該保護カバーが前記フォークを覆ったときに、前記フォークの一対のフィンガーの各々に取り付けられた対向型の光検出器６５の光を遮光可能な遮光板１２０と、を有する。【選択図】図５ |
|---|