OPTICAL IMAGING DEVICE

PROBLEM TO BE SOLVED: To provide an optical imaging device and an optical imaging method, which make it possible to easily compensate for an environmental influence on an optical element, due to local heat.SOLUTION: An optical element group is constructed so as to project a projection pattern onto a substrate and includes a plurality of optical elements having an immersion element 109 that is at least temporarily located adjacent to an immersion zone 110 during operation. During operation, the immersion zone is located between the immersion element and a substrate 105.1 and is at least temporarily filled with an immersion medium. A thermal attenuation device 111 is provided which is constructed so as to reduce a fluctuation induced in a temperature distribution TE of the immersion element by the immersion medium.SELECTED DRAWING: Figure 2 【課題】光学素子に対する局所的な熱による環境影響を補償できる光学結像装置、及び光学結像方法を提供する。【解決手段】光学素子群が、基板に投影パターンを投影するように構成されており、作動中に少なくとも一時的に液浸ゾーン１１０に隣接して配置される液浸素子１０９を有する複数の光学素子を備え、作動中に液浸ゾーンが液浸素子と基盤１０５．１との間に配置され、少なくとも一時的に液浸媒体が充填され、熱減衰装置１１１が液浸媒体によって液浸素子の温度分布ＴＥに誘発される変動を減じるように構成する。【選択図】図２