APPARATUS AND METHOD FOR TREATING WATER TO BE TREATED

PROBLEM TO BE SOLVED: To provide an apparatus or the like for treating water to be treated which can treat both first water to be treated containing ammonia and second water to be treated containing TMAH, and whose installation area can be made smaller, and whose operation management can be facilita...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KANO HISANAO, TERADA AKIHIKO, TAKEDA ARIYUKI, NUMANO TETSURO
Format: Patent
Sprache:eng ; jpn
Schlagworte:
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