METHOD FOR OPERATING VACUUM PUMP OR SCROLL PUMP HAVING AT LEAST TWO PUMP STAGES, AND VACUUM PUMP

PROBLEM TO BE SOLVED: To provide a method capable of prolonging a service life of an abradable seal in a vacuum pump, and detecting abrasion of the seal in the vacuum pump early.SOLUTION: A vacuum pump 101 has at least one pump stage, a motor and a motor control part. In the vacuum pump that is a dr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KALLENBORN STEFAN, HEIKO SCHAEFER
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTMACHINES FOR LIQUIDS ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTPUMPS WEAPONS
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