METHOD OF MANUFACTURING LIGHT EMISSION DEVICE
PROBLEM TO BE SOLVED: To provide a method of manufacturing a light emission device in which an electrode pattern is prevented from being deviated from an intended shape when an electrode of a light emission device containing an organic layer is formed according to film formation using a mask.SOLUTIO...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a method of manufacturing a light emission device in which an electrode pattern is prevented from being deviated from an intended shape when an electrode of a light emission device containing an organic layer is formed according to film formation using a mask.SOLUTION: A light emission device manufacturing method comprises a step of forming, on a substrate 100, a light emission part having a first electrode, a second electrode and an organic layer disposed between the first electrode and the second electrode. In this step, the second electrode is deposited by using a mask 200 having at least two openings 204 arranged in a first direction. In the first direction, the lengths of the openings 204 are larger than the interval of the openings 204. By adjusting the interval ain the first direction of the openings 204, the distance Lfrom the mask 200 to a deposition source 220 and the distance Lfrom the mask 200 to the substrate 100, the second electrode is formed at a portion of the substrate 100 which is covered by a portion (intermediate portion 206) located between the two openings 204 on the mask 200 so that no nick is formed in the first direction.SELECTED DRAWING: Figure 8
【課題】有機層を含む発光装置の電極を、マスクを用いた成膜によって形成する場合において、電極のパターンが意図した形状からずれないようにする。【解決手段】基板100に、第1電極、第2電極、及び前記第1電極と前記第2電極の間に位置する有機層と、を有する発光部を形成する工程を備える。この工程において、少なくとも2つの開口204が第1の方向に並んだマスク200を用いて前記第2電極を蒸着する。第1の方向において、開口204の長さは開口204の間隔よりも大きい。そして、開口204の第1の方向の間隔a1、マスク200から蒸着源220までの距離L1、及びマスク200から基板100までの距離L2を調節することにより、基板100のうち、マスク200の2つの開口204の間に位置する部分(中間部206)に覆われている部分に、第2電極を第1の方向に切れ目なく形成する。【選択図】図8 |
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