EDDY CURRENT INSPECTION DEVICE AND EDDY CURRENT INSPECTION METHOD

PROBLEM TO BE SOLVED: To provide an eddy current inspection device and an eddy current inspection method using the same capable of efficiently and accurately performing an inspection without removing deposits and estimating a depth of the defect.SOLUTION: An eddy current inspection device includes: a first calibration curve showing a relationship between a lift-off distance of a probe 10 and an output value of one inspection coil; and a second calibration curve group having a second calibration curve showing the relationship between a depth of the simulated defect formed on a test-piece and the output value difference of a pair of detection coils. The lift-off distance corresponding to the output value of one detection coil measured from the first calibration curve is acquired as a film thickness of the deposit. The second calibration curve corresponding to the lift-off distance equivalent to the acquired film thickness is selected from the second calibration curve group. The depth of the simulated defect corresponding to the output value difference of the pair of detection coils measured from the selected second calibration curve is acquired as the depth of the defect.SELECTED DRAWING: Figure 1 【課題】 付着物を除去することなく効率よく且つ精度良く検査でき、しかも、欠陥の深さを推定することの可能な渦電流検査装置及びこれを用いた渦電流検査方法を提供すること。【解決手段】 プローブ１０のリフトオフ距離と一方の検査コイルの出力値との関係を示す第一検量線と、試験片に形成した模擬欠陥の深さと一対の検査コイルの出力値差との関係を示す第二検量線を所定のリフトオフ距離毎に備える第二検量線群とを有する。第一検量線から測定した一方の検査コイルの出力値に対応するリフトオフ距離を付着物の膜厚として求める。求めた膜厚に相当するリフトオフ距離に対応する第二検量線を第二検量線群から選択する。選択した第二検量線から測定した一対の検査コイルの出力値差に対応する模擬欠陥の深さを欠陥の深さとして求める。【選択図】 図１