CHARGED PARTICLE BEAM DEVICE AND ABERRATION CORRECTION METHOD

PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of reducing axis adjustment man hours and adjustment time even when including a multistage multipole type aberration corrector.SOLUTION: Disclosed is a charged particle beam device including: a multistage multi-pole type aberration corrector 103; a deflector 108; a power source 131 including a quadrupole wobbler circuit in which slight movement of quadrupole intensity is independently performed at each stage of multi-poles; an axis deviation calculation part which calculates an image shift amount due to slight movement of the quadrupole intensity; and a deflection amount calculation part which calculates the deflection amount fed-back to the multi-poles and the deflector 108 in accordance with the image shift amount. The deflection amount calculated by the deflection amount calculation part is obtained by interlockingly executing deflection having a plurality of stages in the aberration corrector.SELECTED DRAWING: Figure 1 【課題】多段多極子型の収差補正器を備えた場合であっても、軸調整工数や調整時間を低減できる荷電粒子線装置を提供する。【解決手段】多段多極子型の収差補正器１０３と、偏向器１０８と、多極子の各段で独立に４極子強度の微動を行う４極子ワブラ回路を含む電源１３１と、制御部と、４極子強度の微動による画像シフト量を算出する軸ズレ算出部と、像シフト量に応じて多極子および偏向器１０８へフィードバックする偏向量を算出する偏向量算出部とを有し、偏向量算出部で算出される偏向量は、収差補正器における複数段の偏向を連動して行うことにより求められる荷電粒子線装置とする。【選択図】図１