ELECTROLYTIC DEVICE FOR INDIUM HYDROXIDE POWDER OR TIN HYDROXIDE POWDER, METHOD FOR PRODUCING INDIUM HYDROXIDE POWDER OR TIN HYDROXIDE POWDER, AND METHOD FOR PRODUCING SPUTTERING TARGET

PROBLEM TO BE SOLVED: To provide an electrolytic device for indium hydroxide powder or tin hydroxide powder, in which the indium hydroxide powder or tin hydroxide powder having excellent particle size uniformity and a narrow particle size distribution width can be generated.SOLUTION: The electrolyti...

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Hauptverfasser: KAMO TETSUO, SUGAMOTO NORIAKI, MORIMOTO TOSHIO
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide an electrolytic device for indium hydroxide powder or tin hydroxide powder, in which the indium hydroxide powder or tin hydroxide powder having excellent particle size uniformity and a narrow particle size distribution width can be generated.SOLUTION: The electrolytic device 1 for electrolyzing indium or tin to generate indium hydroxide powder or tin hydroxide powder includes: an electrolytic cell 10 in which an electrolytic solution 11 is stored and a plurality of electrodes are arranged in parallel at predetermined intervals; an adjustment tank 20 for adjusting the electrolytic solution; a feed nozzle 32 which is arranged in the vicinity of a tank wall 17a of the electrolytic cell and used for jetting the electrolytic solution toward, at least, the space between electrodes in parallel with the width direction of the electrode; and a suction nozzle 34 which is arranged in the vicinity of the tank wall 17b of the electrolytic cell at a position opposed to the feed nozzle. The electrolytic solution is withdrawn from the electrolytic cell and jetted through the feed nozzle toward the adjustment tank side in parallel with the width direction of the electrode and the jetted electrolytic solution is sucked through the suction nozzle and transferred to the adjustment tank so that the electrolytic solution is circulated between the electrolytic cell and the adjustment tank.SELECTED DRAWING: Figure 1 【課題】粒径の均一性に優れ、粒度分布の幅が狭い水酸化インジウム粉又は水酸化スズ粉を生成することが可能な水酸化インジウム粉又は水酸化スズ粉の電解装置を提供する。【解決手段】インジウム又はスズを電解して水酸化インジウム粉又は水酸化スズ粉を生成する電解装置1であって、電解液11を貯留し、複数の電極が所定の間隔で平行に設けられる電解槽10と、電解液を調整する調整槽20と、電解槽の一の槽壁17a付近に設けられ、少なくとも電極間に電極の幅方向と平行に電解液を噴流する供給ノズル32と、供給ノズルと対向する位置に電解槽の槽壁17b付近に設けられる吸引ノズル34とを備え、供給ノズルを介して調整槽から電解液を供給して調整槽側に向って電極の幅方向と平行に電解液を噴流させ、吸引ノズルを介して電解液を吸引して調整槽へ移送させることにより、電解槽と調整槽間で電解液を循環させる。【選択図】図1