ELECTROLYTIC DEVICE, METHOD FOR PRODUCING INDIUM HYDROXIDE POWDER AND METHOD FOR PRODUCING SPUTTERING TARGET

PROBLEM TO BE SOLVED: To produce an indium hydroxide powder having a narrow particle size distribution width by suppressing variations in the degree of grain growth and the aggregation degree of an indium hydroxide powder in the vicinity of an electrode.SOLUTION: There is provided an electrolytic device 100 for producing an indium hydroxide powder by electrolyzing indium, which comprises an electrolytic tank 101 which stores an electrolytic solution 102 and is provided with a plurality of electrodes 103 and 104 immersed in an electrolytic solution and an oxygen supply part 110 which is provided on a tank bottom side of the electrolytic tank and supplies an oxygen-containing gas in a foam state between at least electrodes from the tank bottom side into the electrolytic solution, wherein the oxygen supply part supplies an oxygen-containing gas so that the concentration of dissolved oxygen of the electrolytic solution is at least 10 ppm or more and the electrolytic solution is stirred with the oxygen-containing gas.SELECTED DRAWING: Figure 1 【課題】電極近傍における水酸化インジウム粉の粒成長度合及び凝集度合のばらつきを抑制することで、粒度分布幅の狭い水酸化インジウム粉を生成する。【解決手段】インジウムを電解して水酸化インジウム粉を生成する電解装置１００であって、電解液１０２が貯留され、複数の電極１０３、１０４が電解液に浸漬して設けられる電解槽１０１と、電解槽の槽底側に設けられ、少なくとも電極の間に酸素含有ガスを泡状にして槽底側から電解液中に供給する酸素供給部１１０と、を備え、酸素供給部は、電解液の溶存酸素濃度が少なくとも１０ｐｐｍ以上となるように酸素含有ガスを供給して、当該酸素含有ガスによって電解液を撹拌する。【選択図】図１