LIQUID CHEMICAL STORAGE TANK AND LIQUID CHEMICAL REPLENISHMENT METHOD FOR LIQUID CHEMICAL STORAGE TANK

PROBLEM TO BE SOLVED: To provide a liquid chemical storage tank in which liquid chemical remaining in the tank is not mixed with new liquid chemical to be replenished.SOLUTION: A liquid chemical storage tank 10 is provided that has liquid chemical replenishment means and liquid chemical discharge means. The liquid chemical storage tank 10 is divided into an upper liquid chemical replenishment chamber 1 and a lower liquid chemical storage chamber 2 by a division wall 3. The liquid chemical replenishment chamber 1 has liquid chemical replenishment means 12 and the liquid chemical storage chamber 2 has liquid chemical discharge means 13. The bottom of the liquid chemical replenishment chamber 1 and the bottom of the liquid chemical storage chamber 2 are connected to each other by a connection pipe 8 having an on-off valve 9. The liquid chemical replenishment chamber 1 and the liquid chemical storage chamber 2 include liquid level measurement means 4, 4' for measuring the liquid level of the liquid chemical, respectively.SELECTED DRAWING: Figure 1 【課題】残留している薬液と補充される新品の薬液とが混合することのない薬液貯留槽を提供すること。【解決手段】薬液の充填手段と薬液の排出手段とを備えた薬液貯留槽１０であって、薬液貯留槽１０は隔壁３によって、上部の薬液補充室１と下部の薬液貯蔵室２とに区分されており、薬液補充室１は薬液充填手段１２を備えており、薬液貯蔵室２は薬液排出手段１３を備えており、薬液補充室１の底部と薬液貯蔵室２の底部とは開閉弁９を備えた連結管８によって連結されており、薬液補充室１及び薬液貯蔵室２には薬液の液位を計測するための液位計測手段４、４'が設けられていることを特徴とする薬液貯留槽。【選択図】図１