GAS FILTRATION APPARATUS AND GAS FILTRATION METHOD

PROBLEM TO BE SOLVED: To increase a processing speed of a gas filtration apparatus using a porous body membrane.SOLUTION: A first chamber 16 and a second chamber 18 are partitioned by a porous body membrane 14. First gas containing tramp material is supplied to the first chamber 16 with a first pump 20, the first gas is supplied to the second chamber 18 with a second pump 22, and both chambers are compressed. A surface 14b facing the second chamber 18, of the porous body membrane 14 is heated with a heater 38, and by the heating, thermal transpiration flow is generated in the porous body membrane 14. Tramp material larger than a pore size of the porous body membrane 14 remains in the first chamber 16, and is removed. Although a lean degree of gas is decreased by compression to reduce the flow velocity of the thermal transpiration flow, an effect of density increase by compression exceeds the reduction in the flow velocity of the thermal transpiration flow to increase a mass flow.SELECTED DRAWING: Figure 1 【課題】多孔体膜を利用した気体濾過装置の処理速度を高くする。【解決手段】第１室１６と第２室１８は多孔体膜１４で隔てられている。第１ポンプ２０により第１室１６に混入物を含む第１の気体を供給、第２ポンプ２２におり第２室１８に第１の気体を供給し、共に加圧する。ヒータ３８により、多孔体膜１４の第２室１８に対向する面１４ｂを加熱する。加熱によって、多孔体膜１４内に熱遷移流が発生する。多孔体膜１４の細孔径より大きい混入物は、第１室１６内に留まり、除去される。加圧により気体の希薄度が低下し、熱遷移流の流速が減少するが、加圧による密度増加の効果がこれを上回り、質量流量が増加する。【選択図】図１