SUBSTRATE TRANSFER APPARATUS

PROBLEM TO BE SOLVED: To provide a substrate transfer apparatus that prevents generation of fine particles.SOLUTION: A substrate transfer apparatus comprises: a tray 100 on which a substrate is loaded; a magnetic transfer unit 200 provided at a lower side of the tray 100, magnetically levitating the...

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Bibliographische Detailangaben
Hauptverfasser:	KIM JUNG GUN, LEE KI TAE, SO BYUNG HO, KIM NAM HOON, HAN EUNG YONG, I SANHO, JUNG MIN-HO, KIM SUN GIL, KIM JONG DAE, KO WON IL, SON SEOUNG KYOUNG
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a substrate transfer apparatus that prevents generation of fine particles.SOLUTION: A substrate transfer apparatus comprises: a tray 100 on which a substrate is loaded; a magnetic transfer unit 200 provided at a lower side of the tray 100, magnetically levitating the tray 100, and transferring the tray by magnetic force; and a guide unit 300 for guiding the transfer of the tray 100 while not making contact with the tray 100.SELECTED DRAWING: Figure 8 【課題】粉塵の発生を防ぐ基板搬送装置を提供する。【解決手段】基板が載置されるトレイ１００と、このトレイ１００の下側に設けられ、このトレイ１００を磁気浮上させ、磁気力を用いて搬送する磁気搬送ユニット２００と、トレイ１００と接触されずにトレイ１００の搬送をガイドするガイドユニット３００とを設ける。【選択図】図８