ROTARY JIG AND FILM DEPOSITION APPARATUS

PROBLEM TO BE SOLVED: To provide a rotary jig 1 capable of supporting surely rotation of a rotary table 20 in a film deposition apparatus 10, and arranging quickly regardless of skill or experience of an operator.SOLUTION: A rotary jig 1 is constituted of a ring-shaped member 2 and a projection member 3 formed toward the inner peripheral side of the ring-shaped member 2. A rod-like member 4 can be also mounted on the outer peripheral side of the ring-shaped member 2. Further, in the rotary jig 1, a bent member 5 can be mounted on the outer peripheral side of the ring-shaped member 2, and can be opened and closed along the outer peripheral side of the ring-shaped member 2.SELECTED DRAWING: Figure 1 【課題】成膜装置１０内の回転テーブル２０の回転を確実にサポートし、作業者の技能や経験によらず速やかに段取りできる回転治具１を提供する。【解決手段】リング状部材２と、リング状部材２の内周側に向けて形成された凸状部材３と、から構成された回転治具１とする。また、リング状部材２の外周側には棒状部材４を取り付けることもできる。さらに、リング状部材２の外周側には、湾曲部材５が取り付けられており、リング状部材２の外周側に沿って開閉可能である回転治具１とすることもできる。【選択図】図１